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TOF-SIMS  SIMS  Time-of-Flight  Surface Spectroscopy  Surface Imaging  Depth Profiling  3D Analysis  Retrospective Analysis LEIS TOF-SIMS TOF-SIMS is an acronym for the combination of the analytical technique SIMS (Secondary Ion Mass Spectrometry) with Time of Flight mass analysis (TOF). In different operational modes - surface spectroscopy, surface imaging, depth profiling, 3D analysis - this analysis technique offers unique features: Information Obtained detection of all elements and isotopes chemical information via molecular and cluster ions Detection Limits ppm of a monolayer for elements sub-fmol for molecules Spatial Location high lateral resolution (< 60 nm) high surface sensitivity (< 1 nm) high depth resolution (< 1 nm)