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Principle of
LEIS
In LEIS analysis the
sample surface is bombarded with noble gas ions at an energy
of a few keV.
The ions are scattered by the atoms of the surface following
the laws of the conservation of energy
and momentum.
By measuring the energy of the backscattered ions the masses
of the scattering surface atoms are determined. With the
advanced analyzer design of the Qtac100 the
measured intensity is directly proportional to the surface
coverage of the corresponding element and is not influenced
by
the chemical environment. This allows matrix independent
quantification.

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Scattering of noble
gas ions by surface atoms
Energy spectrum of
the scattered ions corresponding to the masses of the
surface atoms
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