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Surface
Spectroscopy
The aim of a static SIMS investigation is the analysis of
the original, non-modified surface composition.
As SIMS in principle is a destructive technique this means
that the contribution of those secondary ions to the
spectrum originating from already bombarded surface areas to
the spectrum must be negligible. This quasi non-destructive
surface analysis can be achieved by the application of very
low primary ion dose densities. Surface Spectroscopy
provides detailed elemental and molecular information from
the outer monolayers.
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High sensitivity in the ppm/ppb
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High mass resolution and accuracy
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insulating samples |
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High mass range |
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