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Static Depth
Profiling
In LEIS the majority of
the ions detected are scattered at the surface. Those
scattered from atoms below the surface lose additional
energy proportional to the depth at which the scattering
occurred.
By measuring this energy loss, the elemental composition of
sub-surface layers is determined non-destructively. This
static depth profiling provides information down to a depth
of 10 nm. This mode also allows a quantitative measurement
of the thickness of organic overlayers such as
Langmuir-Blodgett films or self-assembled monolayers.
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