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Time-of-Flight
Mass Filter
In conventional LEIS,
secondary ions, generated by the impact of the noble gas
ions, lead to a high background for low scattering energies.
This background reduces dynamic range and detection limits,
in particular for light elements.
The Qtac100 is equipped with a time-of-flight
detection system, which separates the scattered noble gas
ions from this background. This unique feature significantly
improves the elemental detection limits and the dynamic
range of the instrument.

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LEIS spectrum
of a technical
polymer without
time-of-flight
mass filtering

LEIS spectrum of the same sample with time-of-flight mass
filtering showing significantly improved detection limits
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