technique-IONTOF-TOF-SIMS-TIME-OF-FLIGHT-SURFACE-ANALYSIS
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IONTOF-TOF-SIMS-TIME-OF-FLIGHT-SURFACE-ANALYSIS
IONTOF-TOF-SIMS-TIME-OF-FLIGHT-SURFACE-ANALYSIS
IONTOF-TOF-SIMS-TIME-OF-FLIGHT-SURFACE-ANALYSIS
IONTOF-TOF-SIMS-TIME-OF-FLIGHT-SURFACE-ANALYSIS
IONTOF-TOF-SIMS-TIME-OF-FLIGHT-SURFACE-ANALYSIS
IONTOF-TOF-SIMS-TIME-OF-FLIGHT-SURFACE-ANALYSIS
IONTOF-TOF-SIMS-TIME-OF-FLIGHT-SURFACE-ANALYSIS
IONTOF-TOF-SIMS-TIME-OF-FLIGHT-SURFACE-ANALYSIS
IONTOF-TOF-SIMS-TIME-OF-FLIGHT-SURFACE-ANALYSIS
IONTOF-TOF-SIMS-TIME-OF-FLIGHT-SURFACE-ANALYSIS
IONTOF-TOF-SIMS-TIME-OF-FLIGHT-SURFACE-ANALYSIS
IONTOF-TOF-SIMS-TIME-OF-FLIGHT-SURFACE-ANALYSIS
IONTOF-TOF-SIMS-TIME-OF-FLIGHT-SURFACE-ANALYSIS
IONTOF-TOF-SIMS-TIME-OF-FLIGHT-SURFACE-ANALYSIS
IONTOF-TOF-SIMS-TIME-OF-FLIGHT-SURFACE-ANALYSIS
IONTOF-TOF-SIMS-TIME-OF-FLIGHT-SURFACE-ANALYSIS
IONTOF-TOF-SIMS-TIME-OF-FLIGHT-SURFACE-ANALYSIS
IONTOF-TOF-SIMS-TIME-OF-FLIGHT-SURFACE-ANALYSIS
IONTOF-TOF-SIMS-TIME-OF-FLIGHT-SURFACE-ANALYSIS
IONTOF-TOF-SIMS-TIME-OF-FLIGHT-SURFACE-ANALYSIS
IONTOF-TOF-SIMS-TIME-OF-FLIGHT-SURFACE-ANALYSIS
IONTOF-TOF-SIMS-TIME-OF-FLIGHT-SURFACE-ANALYSIS
IONTOF-TOF-SIMS-TIME-OF-FLIGHT-SURFACE-ANALYSIS
IONTOF-TOF-SIMS-TIME-OF-FLIGHT-SURFACE-ANALYSIS
IONTOF-TOF-SIMS-TIME-OF-FLIGHT-SURFACE-ANALYSIS
IONTOF-TOF-SIMS-TIME-OF-FLIGHT-SURFACE-ANALYSIS
IONTOF-TOF-SIMS-TIME-OF-FLIGHT-SURFACE-ANALYSIS
TOF-SIMS
LEIS
 Energy Analysis
 TOF Mass Filter
 Surface Spectroscopy
 Surface Imaging
 Static Depth Profiling
 Sputter Depth Profiling
 
IONTOF-TOF-SIMS-TIME-OF-FLIGHT-SURFACE-ANALYSIS
Surface Imaging

By rastering a focused ion beam over the surface, mass resolved elemental images (chemical maps) can be obtained.

 Ti IONTOF-TOF-SIMS-TIME-OF-FLIGHT-SURFACE-ANALYSIS Cu

Overlay

 IONTOF-TOF-SIMS-TIME-OF-FLIGHT-SURFACE-ANALYSIS IONTOF-TOF-SIMS-TIME-OF-FLIGHT-SURFACE-ANALYSIS IONTOF-TOF-SIMS-TIME-OF-FLIGHT-SURFACE-ANALYSIS IONTOF-TOF-SIMS-TIME-OF-FLIGHT-SURFACE-ANALYSIS

Field of view:
2 x 2 mm2

LEIS images of a metal structure showing the Ti and Cu distribution (top) and an overlay (bottom)
IONTOF-TOF-SIMS-TIME-OF-FLIGHT-SURFACE-ANALYSIS