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Customized Solutions
TOF.SIMS 5 with Qtac
Extension
For many samples,
including those with sensitive surfaces, the in-situ
transfer between analytical techniques is very useful,
avoiding contamination between analyses, and permitting
direct comparison of results. The combination of the Qtac
with the time-of-flight secondary ion mass spectrometer
TOF.SIMS 5 makes a very effective tool for inorganic and
organic surface analysis. The combination provides top
atomic layer analysis, surface chemical mapping, static and
dynamic depth profiling, 3D chemical imaging, layer
thickness measurement, and quantification.
Adding the
Qtac to Other Instrumentation
Many manufacturing,
surface treatment, and thin layer deposition techniques
benefit from on-line quality control.
For coverage and layer thickness measurements, the Qtac
makes an ideal addition. The Qtac is available as a bolt-on
system, tailored to individual requirements, for laboratory
instruments or industrial tools. ALD and MBE instrumentation
are typical examples.

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Qtac bolt-on module including energy analyzer and noble gas
ion source

Qtac bolt-on module attached to the preparation chamber
of a TOF.SIMS 5
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