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Glass Analysis of Insulating Samples Due to the very efficient electron floodgun, perfect charge compensation is achieved for analyzing all types of insulating samples. High mass resolution, high lateral resolution and high depth resolution in combination with the Retrospective Analysis makes TOF-SIMS a very powerful tool for multi-component-layer samples, contamination screening, corrosion analysis, particle identification, diffusion profiling, failure analysis (e.g. stains, discoloring) and unknown samples. At higher sputter beam energy, samples of considerable thickness can be analyzed within a reasonable measurement time (sputter rate: up to 10 µm/h).  |
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Depth profile through a multilayer coating on a halogen spotlight reflector. |