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3D Analysis
The visualization of 3D sample structures is possible by
combining spectral, imaging and depth information. 3D
Analysis is ideal for the investigation of complex and
unknown structures or defects.
In particular the composition, shape and position of
features and defects can be visualized.
Applications include:
Manufactured structures: TFT displays...
Defect Analysis: buried particles...
Material Science: grain boundaries, diffusion...
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Parallel mass detection |
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High depth resolution |
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High image resolution |

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